Optical characterization of laterally and vertically structured oxides and semiconductors
Petrik P., Kumar N., Agocs E., Fodor B., Pereira S. F., Lohner T., Fried M., Urbach H. P.ZnO, Ellipsometry, Scatterometry, Material Structure
| Document type | Proceedings |
| Journal title / Source | Proc. of SPIE |
| Volume | Vol. 8987 |
| Publication date | 2015 |
| DOI | 10.1117/12.2042181 |
| Web URL | http://spiedigitallibrary.org/ |
| Language | English |