Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology

Manske E., Fuessl R., Mastylo R., Vorbringer-Dorozhovets N., Birli O., Jaeger G.
Keywords:

Nanopositioning and nanomeasuring machine, multiscale measurement, optical and tactile sensors

Document type Article
Journal title / Source tm – Technisches Messen 2015; 82(7–8): 359–366
Peer-reviewed article 1
Volume 82
Issue 7-8
Page numbers / Article number 359-366
Publisher's name De Gruyter
Publisher's address (city only) Oldenbourg
Publication date 2015
DOI 10.1515/teme-2015-0011
Language English

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