Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards

Nouira H, Salgado J-A, El-Hayek N, Ducourtieux S, Delvallée A, Anwer N

profilometer, atomic force microscopy, confocal chromatic probe, tactile/inductive probe, error sources, dimensional and mechanical metrology, evaluation

Document type Article
Journal title / Source Measurement Science and Technology
Volume 25
Publication date 2014-3-5
ISSN Online ISSN: 1742-6596
DOI 10.1088/0957-0233/25/4/044011

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