Demystifying data evaluation in the measurement of periodic structures
Nečas D., Yacoot A., Valtr M., Klapetek P.Nanometrology, Scanning probe microscopy, calibration, grating period
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 34 |
| Issue | 5 |
| Page numbers / Article number | 055015 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2023-2-21 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/acbab3 |
| Language | English |