Demystifying data evaluation in the measurement of periodic structures

Nečas D., Yacoot A., Valtr M., Klapetek P.

Nanometrology, Scanning probe microscopy, calibration, grating period

Document type Article
Journal title / Source Measurement Science and Technology
Volume 34
Issue 5
Page numbers / Article number 055015
Publisher's name IOP Publishing
Publisher's address (city only) Bristol, United Kingdom
Publication date 2023-2-21
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/acbab3
Language English

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