Hybrid Metrology for Nanostructured Optical Metasurfaces - Dataset
Murataj Irdi, Cara Eleonora, Angelini Angelo , Beckhoff Burkhard, Gollwitzer Christian, Boarino Luca, Kayser Yves , Ferrarese Lupi FedericoBlock Copolymers, Sequential Infiltration Synthesis, Grazing Incidence X-ray Fluorescence, Grazing Incidence Small Angle X-ray Scattering, Synchrotron Radiation
| Document type | Datasets |
| Journal title / Source | Zenodo |
| DOI | 10.5281/zenodo.10182956 |