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Real-Time Ellipsometry at High and Low Temperatures

Mukherjee D., Petrik P.
Keywords:

In-situ ellipsometry, High temperature measurement, Low temperature measurement, Optical characterization

Document type Article
Journal title / Source ACS Omega
Volume 8
Issue 4
Page numbers / Article number 3684-3697
Publisher's name American Chemical Society (ACS)
Publisher's address (city only) Washington, DC, United States
Publication date 2023-1-17
ISSN 2470-1343, 2470-1343
DOI 10.1021/acsomega.2c07438
Language English

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Information

Name of Call / Funding Programme
EMPIR 2020: Fundamental