Tilted Wave Interferometer - Improved Measurement Uncertainty
Mühlig S., Siepmann J., Lotz M., Jung S., Schindler J., Baer G.Twyman-Green Interferometer, Asphere and freeform measurement, Interfrometer calibration, Virtual experiments
Document type | Proceedings |
Journal title / Source | Proceedings of 58th Ilmenau Scientific Colloqium |
Publication date | 2014-11-11 |
Conference name | 58th Ilmenau Scientific Colloquium |
Conference date | 08 - 12 Sep. 2014 |
Conference place | Technische Universität Ilmenau, Ilmenau, Germany |
Web URL | http://www.db-thueringen.de/servlets/DocumentServlet?id=24989 |