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Tilted Wave Interferometer - Improved Measurement Uncertainty

Mühlig S., Siepmann J., Lotz M., Jung S., Schindler J., Baer G.
Keywords:

Twyman-Green Interferometer, Asphere and freeform measurement, Interfrometer calibration, Virtual experiments

Document type Proceedings
Journal title / Source Proceedings of 58th Ilmenau Scientific Colloqium
Publication date 2014-11-11
Conference name 58th Ilmenau Scientific Colloquium
Conference date 08 - 12 Sep. 2014
Conference place Technische Universität Ilmenau, Ilmenau, Germany
Web URL http://www.db-thueringen.de/servlets/DocumentServlet?id=24989

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Information

Name of Call / Funding Programme
EMRP A169: Call 2010 Industry