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A Fast and Reliable RF Probing Technique for Autonomous On-Wafer S-Parameter Measurements

Mubarak F., Poduval D., Khot A., Gugole F., Rajabali S., Spirito M.
Keywords:

Calibration, on-wafer probing, GSG probes, impedance standard substrate (ISS), on-wafer measurements, RF probe station, RF probing, S-parameters, wafer-level testing

Document type Proceedings
Journal title / Source 2026 107th ARFTG Microwave Measurement Conference (ARFTG)
Page numbers / Article number 1-5
Publisher's name IEEE
Publisher's address (city only) Piscataway, NJ, United States
Publication date 2026-1-1
Conference name 107th ARFTG Microwave Measurement Conference
Conference date 12 June 2026
Conference place Boston, MA, USA
ISSN 2767-8776
DOI 10.1109/ARFTG68740.2026.11614632

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Name of Call / Funding Programme
Metrology Partnership 2023: Industry