The gateway to Europe's
integrated metrology community.

An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz

Mubarak F., Ridler N., Fisher G., Schmidt R., Stake J., Jayasankar D., Allal D., Doerner R., Flisgen T., Ducournau G., Haddadi K., Arz U., Phung G., Shang X.
Keywords:

Calibration, coplanar waveguides (CPW), on-wafer, S-parameter measurements, comparison, Terahertz metrology

Document type Article
Journal title / Source IEEE Transactions on Terahertz Science and Technology
Volume 15
Issue 3
Page numbers / Article number 344-358
Publisher's name IEEE
Publisher's address (city only) Piscataway
Publication date 2025-1-30
ISSN 2156-342X
DOI 10.5281/zenodo.15395761
Web URL https://doi.org/10.5281/zenodo.15395761
Language English

Back to the list view

Information

Name of Call / Funding Programme
Metrology Partnership 2023: Industry