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A substitution method for nanoscale capacitance calibration using scanning microwave microscopy

Morán-Meza J.A., Delvallée A., Allal D., Piquemal F.


Document type Article
Journal title / Source Measurement Science and Technology
Volume 31
Issue 7
Page numbers / Article number 074009
Publisher's name IOP Publishing
Publication date 2020-5
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab82c1
Language English

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Project title (JRP)
16ENG06: ADVENT: Metrology for advanced energy-saving technology in next-generation electronics applications
Name of Call / Funding Programme
EMPIR 2016: Energy