Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
Gross H., Henn M.-A., Heidenreich S., Rathsfeld A., Bär M.| Document type | Article |
| Journal title / Source | APPLIED OPTICS |
| Volume | 51 |
| Issue | 30 |
| Page numbers / Article number | 7384 - 7394 |
| Publication date | 2012-10-18 |
| DOI | 10.1364/AO.51.007384 |
| Language | English |