Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS

Milles L.F., Stahl S.W., Sulzbach T., Engl W., Gao S., Brand U., Nesterov V., Li Z.

cantilever stiffness calibration, active reference spring, micro-electro-mechanical system

Document type Article
Journal title / Source Measurement Science and Technology
Volume 28
Issue 3
Page numbers / Article number 034010
Publisher's name IOP Publishing
Publication date 2017-1-23
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/28/3/034010
Language English

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