MEMS-based voltage detector
Helistö P, Seppä H, Manninen ACapacitive sensors; MEMS; Readout; Pull-in; Noise; Voltage measurement
| Document type | Article |
| Journal title / Source | Sensors and Actuators A: Physical |
| Peer-reviewed article | 1 |
| Volume | 234 |
| Issue | n/a |
| Page numbers / Article number | 99-103 |
| Publisher's name | Elsevier |
| Publisher's address (city only) | Amsterdam |
| Publication date | 2015-8-24 |
| ISSN | n/a |
| DOI | 10.1016/j.sna.2015.08.011 |
| Web URL | https://www.researchgate.net/publication/282373168_MEMS-based_voltage_detector |
| Language | English |