Traceability of form measurements of freeform surfaces: metrological reference surfaces

Fortmeier I., Schulz M., Meeß R.

metrology; freeform; reference artifact; traceability; interferometry; measurement comparison

Document type Article
Journal title / Source Optical Engineering
Volume 58
Issue 9
Page numbers / Article number 092602-1-7
Publication date 2019-3-26
DOI 10.1117/1.OE.58.9.092602
Language English

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