Traceability of form measurements of freeform surfaces: metrological reference surfaces
Fortmeier I., Schulz M., Meeß R.metrology; freeform; reference artifact; traceability; interferometry; measurement comparison
| Document type | Article |
| Journal title / Source | Optical Engineering |
| Volume | 58 |
| Issue | 9 |
| Page numbers / Article number | 092602-1-7 |
| Publication date | 2019-3-26 |
| DOI | 10.1117/1.OE.58.9.092602 |
| Language | English |