Artificial neural network assisted spectral scatterometry for grating quality control
Mattila Aleksi, Nysten Johan, Heikkinen Ville, Kilpi Jorma, Korpelainen Virpi, Hansen Poul-Erik, Karvinen Petri, Kuittinen Markku, Lassila Anttiscatterometry, transfer learning, inverse modelling, diffraction, gratings
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 35 |
| Issue | 8 |
| Page numbers / Article number | 085025 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2024-5-31 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ad4e52 |
| Web URL | https://iopscience.iop.org/article/10.1088/1361-6501/ad4e52 |
| Language | English |