Dynamic vacuum measurement by an optical interferometric technique
Mari Domenico, Bergoglio Mercede, Pisani Marco, Zucco Massimodynamic vacuum standard, laser interferometry, nanometrology, vacuum gauge
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 25 (Dec 2014). |
Issue | 12 |
Publication date | 2014-11 |
DOI | 10.1088/0957-0233/25/12/125303 |