Dynamic vacuum measurement by an optical interferometric technique
Mari Domenico, Bergoglio Mercede, Pisani Marco, Zucco Massimodynamic vacuum standard, laser interferometry, nanometrology, vacuum gauge
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 (Dec 2014). |
| Issue | 12 |
| Publication date | 2014-11 |
| DOI | 10.1088/0957-0233/25/12/125303 |