Nanostructure Characterization and Film Thickness Measurements at the Fabrication Line
Madsen J.S.M., Korhonen R., Peltonen P., Rodenko O., Jensen S.A.Roll to Roll nanoembossing, Optical scatterometry, In-line quality control
| Document type | Proceedings |
| Journal title / Source | 2022 IEEE 12th International Conference Nanomaterials: Applications & Properties (NAP) |
| Volume | none |
| Issue | none |
| Page numbers / Article number | 1-4 |
| Publisher's name | IEEE |
| Publisher's address (city only) | unknown |
| Publication date | 2022-9-11 |
| Conference name | 2022 IEEE 12th International Conference Nanomaterials: Applications & Properties (NAP) |
| Conference date | 11-09-2022 to 16-09-2022 |
| Conference place | Krakow, Poland |
| ISSN | unknown |
| DOI | 10.1109/NAP55339.2022.9934704 |
| ISBN | 978-1-6654-8982-9 |
| Language | English |