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TILTED WAVE INTERFEROMETER – DESIGN AND TEST

Lotz M., Siepmann J., Mühlig S., Jung S., Baer G.
Keywords:

Tilted Wave Interferometer, Asphere and freeform measurement, Design

Document type Proceedings
Journal title / Source Proceedings of 58th Ilmenau Scientific Colloqium
Volume 58
Publication date 2014-11-11
Conference name 58th ILMENAU SCIENTIFIC COLLOQUIUM
Conference date 8.-12. September 2014
Conference place Technische Universität Ilmenau, Ilmenau, Germany
Web URL http://www.db-thueringen.de/servlets/DerivateServlet/Derivate-30704/ilm1-2014iwk-117.pdf

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Information

Name of Call / Funding Programme
EMRP A169: Call 2010 Industry