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Interferometric measurement of dimensional and thermal stability of joints

Lorenz, Hagen and Schödel, René

absolute interferometry, gauge blocks, adhesive joints, screw joints, thermal cycling, thermal stability,dimensional stability, drift

Document typeProceeding
Publication date 2014-08-27
Conference nameSPIE Instrumentation, Metrology and Standards for Nanomaufacturing, Optics and Semiconductors VIII
Conference dateAugust, 2014
Conference placeSan Diego, USA

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