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Interferometric measurement of dimensional and thermal stability of joints

Lorenz, Hagen and Schödel, René
Keywords:

absolute interferometry, gauge blocks, adhesive joints, screw joints, thermal cycling, thermal stability,dimensional stability, drift

Document typeProceeding
Volume9173
Issue91730B
Publication date 2014-08-27
Conference nameSPIE Instrumentation, Metrology and Standards for Nanomaufacturing, Optics and Semiconductors VIII
Conference dateAugust, 2014
Conference placeSan Diego, USA
DOI10.1117/12.2060382

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