Interferometric measurement of dimensional and thermal stability of joints

Lorenz Hagen, Schödel René

absolute interferometry, gauge blocks, adhesive joints, screw joints, thermal cycling, thermal stability,dimensional stability, drift

Document type Proceedings
Journal title / Source
Volume 9173
Issue 91730B
Publication date 2014-8-27
Conference name SPIE Instrumentation, Metrology and Standards for Nanomaufacturing, Optics and Semiconductors VIII
Conference date August, 2014
Conference place San Diego, USA
DOI 10.1117/12.2060382

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