Interferometric measurement of dimensional and thermal stability of joints
Lorenz Hagen, Schödel Renéabsolute interferometry, gauge blocks, adhesive joints, screw joints, thermal cycling, thermal stability,dimensional stability, drift
| Document type | Proceedings |
| Journal title / Source | |
| Volume | 9173 |
| Issue | 91730B |
| Publication date | 2014-8-27 |
| Conference name | SPIE Instrumentation, Metrology and Standards for Nanomaufacturing, Optics and Semiconductors VIII |
| Conference date | August, 2014 |
| Conference place | San Diego, USA |
| DOI | 10.1117/12.2060382 |