Interferometric measurement of dimensional and thermal stability of joints

Lorenz Hagen, Schödel René
Keywords:

absolute interferometry, gauge blocks, adhesive joints, screw joints, thermal cycling, thermal stability,dimensional stability, drift

Document type Proceedings
Journal title / Source
Volume 9173
Issue 91730B
Publication date 2014-8-27
Conference name SPIE Instrumentation, Metrology and Standards for Nanomaufacturing, Optics and Semiconductors VIII
Conference date August, 2014
Conference place San Diego, USA
DOI 10.1117/12.2060382

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