Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
Lohr Leonhard M., Ciesielski Richard, Glabisch Sven, Schröder Sophia, Brose Sascha, Soltwisch Victorgrating characterization, EUV scatterometry, soft x-ray,
| Document type | Article |
| Journal title / Source | Applied Optics |
| Volume | 62 |
| Issue | 1 |
| Page numbers / Article number | 117 |
| Publisher's name | Optica Publishing Group |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2022-12-19 |
| ISSN | 1559-128X, 2155-3165 |
| DOI | 10.1364/AO.475566 |
| Language | English |