Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Siewert F, Zeschke T, Arnold T, Paetzelt H, Yashchuk VV
Keywords:

Spatial resolution, Modulation transfer functions, Topography, Calibration, Spatial dimensions

Document type Article
Journal title / Source REVIEW OF SCIENTIFIC INSTRUMENTS
Peer-reviewed article 1
Volume 87
Issue 051907 (2016)
Page numbers / Article number 1-9
Publisher's name American Institute of Physics
Publisher's address (city only) Melville, NY 11747-4300 USA
Publication date 2016-5-24
ISSN ISSN: Print: 0034-6748, Online: 1089-7623
DOI 10.1063/1.4950737
Web URL http://aip.scitation.org/doi/10.1063/1.4950737
Language English

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