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Development of a Reference Wafer for On-wafer Testing of Extreme Impedance Devices

Votsi H., Roch-Jeune I., Haddadi K., Li C., Dambrine G., Aaen P.H., Ridler N.

Standards, Calibration, Impedance, Nanoscale devices, Impedance measurement, Probes, Transmission line measurements, extreme impedance measurement, Calibration, on-wafer measurement, nano-scale, co-planar waveguide, RF nanotechnology

Document type Proceedings
Journal title / Source IEEE XPlore
Publisher's name IEEE
Publisher's address (city only) USA & Canada
Publication date 2016
Conference name Microwave Measurement Conference (ARFTG)
Conference date 08-12-2016 to 09-12-2016
Conference place Austin, TX, USA
DOI 10.1109/ARFTG.2016.7839719
Language English

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Project title (JRP)
14IND02: PlanarCal: Microwave measurements for planar circuits and components
Name of Call / Funding Programme
EMPIR 2014: Industry