Nano-holes as standard leak elements
Lerardi V., Becker U., Pantazis S., Firpo G., Valbusa U., Jousten K.Focused ion beam,Nanotechnology, SEM, STEM, AFM, Standard leak, Gas flow meter, Vacuum Metrology, DSMC.
Document type | Article |
Journal title / Source | Measurement |
Volume | 58 |
Publication date | 2014-9-16 |
DOI | 10.1016/j.measurement.2014.09.017 |