Nano-holes as standard leak elements
Lerardi V., Becker U., Pantazis S., Firpo G., Valbusa U., Jousten K.Focused ion beam,Nanotechnology, SEM, STEM, AFM, Standard leak, Gas flow meter, Vacuum Metrology, DSMC.
| Document type | Article |
| Journal title / Source | Measurement |
| Volume | 58 |
| Publication date | 2014-9-16 |
| DOI | 10.1016/j.measurement.2014.09.017 |