Automated Planarization of GSG Probes for on-Wafer RF Measurements Using a Nanorobotic Probe Station
Lenoir C., Sebbache M., Phung G., Haddadi K.On-wafer measurement, near-field measurement, probe tilt, GSG probe
| Document type | Proceedings |
| Journal title / Source | 2026 107th ARFTG Microwave Measurement Conference (ARFTG) |
| Page numbers / Article number | 1-4 |
| Publisher's name | IEEE |
| Publisher's address (city only) | Piscataway, NJ, United States |
| Publication date | 2026-1-1 |
| Conference name | 107th ARFTG Microwave Measurement Conference |
| Conference date | 12 June 2026 |
| Conference place | Boston, MA, USA |
| ISSN | 2767-8776 |
| DOI | 10.1109/ARFTG68740.2026.11614623 |