Development of infrared absorption-based flow sensor for in-situ measurement of dispenser discharge amount

Lee S.H., Kang W., Im S.

Electronic packaging, Dispenser, Discharge amountm Near-infrared absorption, Thermal mass flowmeter

Document type Article
Journal title / Source Optics and Lasers in Engineering
Volume 161
Page numbers / Article number 107334
Publisher's name Elsevier BV
Publisher's address (city only) Amsterdam, NX, Netherlands
Publication date 2023-2
ISSN 0143-8166
DOI 10.1016/j.optlaseng.2022.107334
Language English

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