Development of infrared absorption-based flow sensor for in-situ measurement of dispenser discharge amount
Lee S.H., Kang W., Im S.Electronic packaging, Dispenser, Discharge amountm Near-infrared absorption, Thermal mass flowmeter
Document type | Article |
Journal title / Source | Optics and Lasers in Engineering |
Volume | 161 |
Page numbers / Article number | 107334 |
Publisher's name | Elsevier BV |
Publisher's address (city only) | Amsterdam, NX, Netherlands |
Publication date | 2023-2 |
ISSN | 0143-8166 |
DOI | 10.1016/j.optlaseng.2022.107334 |
Language | English |