Design and performance of a test rig for evaluation of nanopositioning stages

Yacoot Andrew, Klapetek Petr, Valtr Miroslav, Grolich Petr, Dongmo Herve, Lazzerini Giovanni M, Bridges Angus

multi-axis positioning stages, traceability, nanopositioning, dimensional metrology

Document type Article
Journal title / Source Measurement Science and Technology
Volume 30
Issue 3
Page numbers / Article number 035002
Publisher's name IOP Publishing
Publication date 2019-2
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/aafd03
Language English

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