Metrological characterization methods for confocal chromatic line sensors and optical topography sensors
Seppä J., Niemelä K., Lassila A.optical sensors, calibration, metrology, optical scanners
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 29 |
| Issue | 054008 |
| Page numbers / Article number | 054008 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol? |
| Publication date | 2018-4 |
| ISSN | 0957-0233 |
| DOI | 10.1088/1361-6501/aaad2b |
| Language | English |