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Interferometric 2D small angle generator for autocollimator calibration

Lassila, A., Hemming, B. (MIKES Centre for Metrology and Accreditation), Palosuo, I. (VTT-MIKES, Espoo, Finland), Byman, V. (VTT Technical Research Centre of Finland Ltd, Centre for Metrology (MIKES)) and Heikkinen, V.
Keywords:

autocollimator, interferometry, metrology, angle measurement

Document typeArticle
Journal title / SourceMetrologia
Volume54
Issue3
Page numbers / Article number253-261
Publisher's nameIOP Publishing
Publication date 2017-03-30
ISSN0026-1394, 1681-7575
DOI10.1088/1681-7575/aa648d
LanguageEnglish

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