Interferometric 2D small angle generator for autocollimator calibration

Lassila A., Hemming B., Palosuo I., Byman V., Heikkinen V.

autocollimator, interferometry, metrology, angle measurement

Document type Article
Journal title / Source Metrologia
Volume 54
Issue 3
Page numbers / Article number 253-261
Publisher's name IOP Publishing
Publication date 2017-3-30
ISSN 0026-1394, 1681-7575
DOI 10.1088/1681-7575/aa648d
Language English

Back to the list view