Interferometric 2D small angle generator for autocollimator calibration
Lassila A., Hemming B., Palosuo I., Byman V., Heikkinen V.autocollimator, interferometry, metrology, angle measurement
Document type | Article |
Journal title / Source | Metrologia |
Volume | 54 |
Issue | 3 |
Page numbers / Article number | 253-261 |
Publisher's name | IOP Publishing |
Publication date | 2017-3-30 |
ISSN | 0026-1394, 1681-7575 |
DOI | 10.1088/1681-7575/aa648d |
Language | English |