Interferometric 2D small angle generator for autocollimator calibration
Lassila A., Hemming B., Palosuo I., Byman V., Heikkinen V.autocollimator, interferometry, metrology, angle measurement
| Document type | Article |
| Journal title / Source | Metrologia |
| Volume | 54 |
| Issue | 3 |
| Page numbers / Article number | 253-261 |
| Publisher's name | IOP Publishing |
| Publication date | 2017-3-30 |
| ISSN | 0026-1394, 1681-7575 |
| DOI | 10.1088/1681-7575/aa648d |
| Language | English |