Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry
Künne M., Pahl T., Ribotta L., Giura A., Zucco M., Murataj I., Ferrarese Lupi F., Lehmann P.coherence scanning interferometry (CSI), surface slope angle, silicon V-groove, FEM
| Document type | Article |
| Journal title / Source | Surface Topography: Metrology and Properties |
| Volume | 13 |
| Issue | 1 |
| Page numbers / Article number | 015012 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2025-2 |
| ISSN | 2051-672X |
| DOI | 10.1088/2051-672X/adae25 |
| Web URL | https://iopscience.iop.org/article/10.1088/2051-672X/adae25 |
| Language | English |