Phase retrieval between overlapping orders in coherentFourier scatterometry using scanning
Kumar N., El Gawhary O., Roy S., Pereira S., Urbach H.Fourier scatterometry
| Document type | Article |
| Journal title / Source | Journal of the European Optical Society Rapid Publications |
| Peer-reviewed article | 1 |
| Volume | 8 |
| Publication date | 2013 |
| DOI | 10.2971/jeos.2013.13048 |
| Language | English |