Magnetically levitated planar motion stage with atomic resolution for metrological high-speed scanning probe microscopy
Krueger R., Gloess R.Magnetic levitation, nano-positioning, high-speed scanning probe microscopy
| Document type | Proceedings |
| Journal title / Source | Proceedings of the 23rd international conference of the european society for precision engineering and nanotechnology |
| Publication date | 2023-6-16 |
| Conference name | euspen’s 23 rd International Conference & Exhibition |
| Conference date | 16-06-2023 to 16-06-2023 |
| Conference place | Copenhagen |
| ISBN | ISBN: 978-1-9989991-3-2 |
| Language | English |
| Persistent Identifier | https://www.euspen.eu/resource/magnetically-levitated-planar-motion-stage-with-atomic-resolution-for-metrological-high-speed-scanning-probe-microscopy/ |