Abbildende Müller-Matrix-Ellipsometrie für die Charakterisierung vereinzelter Nanostrukturen
Kroker S., Siefke T., Grundmann J., Käseberg T., Bodermann B.Nanometrology, ellipsometry, Mueller ellipsometry,imaging ellipsometry, nanostructures
| Document type | Article |
| Journal title / Source | tm - Technisches Messen |
| Volume | 89 |
| Issue | 6 |
| Page numbers / Article number | 438-446 |
| Publisher's name | Walter de Gruyter GmbH |
| Publication date | 2022-3 |
| ISSN | 2196-7113, 0171-8096 |
| DOI | 10.1515/teme-2021-0133 |
| Language | German |