Accurate tip characterization in critical dimension atomic force microscopy

Dai G., Korpelainen V., Xu L., Hahm K.

atomic force microscopy (AFM), critical dimension (CD), tip characterization, tip correction, morphological operation, dimensional nanometrology, 3D nanometrology

Document type Article
Journal title / Source Measurement Science and Technology
Publisher's name IOP Publishing
Publication date 2020-3-13
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab7fd2
Language English

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