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Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

Korpelainen, V., Gröschl, A.C., Klöpzig, U., Albrecht, J. and Schaude, J.
Keywords:

Rasterkraftmikroskopie; piezoresistive Cantilever; Nanomessmaschine

Document typeArticle
Journal title / Sourcetm - Technisches Messen
Volume86
Issues1
Page numbers / Article number12-16
Publisher's nameWalter de Gruyter GmbH
Publication date 2019-09
ISSN2196-7113, 0171-8096
DOI10.1515/teme-2019-0035
LanguageEnglish

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