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Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

Schaude, J., Albrecht, J., Klöpzig, U., Gröschl, A.C. and Hausotte, Tino

Rasterkraftmikroskopie; piezoresistive Cantilever; Nanomessmaschine

Document typeArticle
Journal title / Sourcetm - Technisches Messen
Page numbers / Article number12-16
Publisher's nameWalter de Gruyter GmbH
Publication date 2019-09
ISSN2196-7113, 0171-8096

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