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Interlaboratory Comparison of Commercial High-Resistivity Silicon Calibration Substrate at D-Band

Koo H., Ngoc Phung G., Arz U., Cho C., Kwon J.
Keywords:

Calibration, Coplanar Waveguide (CPW), D-band, on-wafer measurement, probe effects, S-parameters

Document type Article
Journal title / Source IEEE Microwave and Wireless Technology Letters
Volume 35
Issue 12
Page numbers / Article number 2129-2132
Publisher's name Institute of Electrical and Electronics Engineers (IEEE)
Publisher's address (city only) Piscataway, NJ, United States
Publication date 2025-1-1
ISSN 2771-9588,2771-957X
DOI 10.1109/LMWT.2025.3625538

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Name of Call / Funding Programme
Metrology Partnership 2023: Industry