High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator

Kondo Y., Bitou Y.

flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator

Document type Article
Journal title / Source Measurement Science and Technology
Volume 25
Issue 9
Page numbers / Article number 095202
Publisher's name IOP Publishing
Publication date 2014-7-24
ISSN 0957-0233, 1361-6501
DOI 10.1088/0957-0233/25/9/095202
Language English

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