High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
Kondo Y., Bitou Y.flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 25 |
Issue | 9 |
Page numbers / Article number | 095202 |
Publisher's name | IOP Publishing |
Publication date | 2014-7-24 |
ISSN | 0957-0233, 1361-6501 |
DOI | 10.1088/0957-0233/25/9/095202 |
Language | English |