High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
Kondo Y., Bitou Y.flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 |
| Issue | 9 |
| Page numbers / Article number | 095202 |
| Publisher's name | IOP Publishing |
| Publication date | 2014-7-24 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/0957-0233/25/9/095202 |
| Language | English |