Virtual experiments for the assessment of data analysis and uncertainty quantification methods in scatterometry
Kok G., Dijk M.V, Wübbeler G., Elster C.virtual experiments, uncertainty calculation, error models, method validation, scatterometry
| Document type | Article |
| Journal title / Source | Metrologia |
| Volume | 60 |
| Issue | 4 |
| Page numbers / Article number | 044001 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2023-6 |
| ISSN | 0026-1394, 1681-7575 |
| DOI | 10.1088/1681-7575/acd6fd |
| Language | English |