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Stitching accuracy in large area Scanning Probe Microscopy

Klapetek P., Nečas D., Heaps E., SAUVET B., Klapetek V., Valtr M., Korpelainen V., Yacoot A.
Keywords:

Image stitching, Scanning Probe Microscope (SPM). large areas SPM, high-speed SPM. SPM error sources

Document type Article
Journal title / Source Measurement Science and Technology
Publisher's name IOP Publishing
Publisher's address (city only) Bristol, United Kingdom
Publication date 2024-9-12
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ad7a13
Language English

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