Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages

Kren P.

interferometry, capacitive distance measurement, flatness, three-flat test, translation stage, mirror, diffraction grating, deformation, layer

Document type Article
Journal title / Source Measurement Science and Technology
Volume 25
Issue 044017
Page numbers / Article number 5pp
Publication date 2014-3-5
ISSN Online ISSN: 1361-6501. Print ISSN: 0957-0233
DOI 10.1088/0957-0233/25/4/044017
Web URL http://iopscience.iop.org/0957-0233/25/4/044017/

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