D5.1 - Compressed nano-FTIR Hyperspectral Imaging for Characterizing Defects in Semiconductors

Kästner B., Elster C., Hoehl A., Marschall M., Siebenkotten D., Wübbeler G., Rühl E., Wood S.

power electronics, semiconductor defects, nano-FTIR, compressed spectroscopy, lowrank matrix reconstruction

Document type Proceedings
Journal title / Source SMSI 2023 Conference
Volume Lectures
Issue D5.1
Page numbers / Article number 231 - 232
Publisher's name AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany
Publisher's address (city only) Wunstorf, Lower Saxony, Germany
Publication date 2023-8
Conference name SMSI 2023
Conference date 08-05-2023 to 11-05-2023
Conference place Nürnberg
ISSN 978-3-9819376-8-8
DOI 10.5162/SMSI2023/D5.1
ISBN 978-3-9819376-8-8
Web URL https://www.ama-science.org/proceedings/details/4425
Language English

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