Inverted plasmonic lens design for nanometrology applications

Käseberg T., Siefke T., Kroker S., Bodermann B.

Plasmonics, Metrology, Plasmonic lens, Microscopy, Nanostructures, Finite Element Method

Document type Article
Journal title / Source Measurement Science and Technology
Volume 31
Issue 7
Page numbers / Article number 074013
Publisher's name IOP Publishing
Publication date 2020-5
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab7e6b
Language English

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