Optical Metrology for Resolving Topological Information of Nanoscale Structures via Modified Mueller Matrix Ellipsometry
Käseberg TimEllipsometry, Metrology, Plasmonic Lenses, Imaging Ellipsometry, Muller Matrix Ellipsometry, Machine Learning
| Document type | Thesis |
| Journal title / Source | |
| University name | Technische Universität Braunschweig |
| Publisher's name | Physikalisch-Technische Bundesanstalt (PTB) |
| Publisher's address (city only) | Braunschweig |
| Publication date | 2024-5-30 |
| ISSN | 2941-1297 |
| DOI | 10.7795/110.20240308 |
| ISBN | 978-3-944659-33-6 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/110.20240308 |
| Language | English |