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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Study of uncertainties of height measurements of monoatomic steps on Si 5 × 5 using DFT

Jelínek, Pavel, Klapetek, Petr (Cesky Metrologicky Institut Brno, Okružní 31, CZ-638 00 Brno) and Campbell, Anna Charvátová
Keywords:

density functional theory, atomic force microscopy, uncertainty

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume28
Issue3
Page numbers / Article number034005
Publisher's nameIOP Publishing
Publisher's address (city only)Temple Circus, Temple Way, Bristol, BS1 6BE, United Kingdom
Publication date 2017-01-24
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/aa5075
LanguageEnglish

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