Study of uncertainties of height measurements of monoatomic steps on Si 5 × 5 using DFT

Jelínek Pavel, Klapetek Petr, Campbell Anna Charvátová

density functional theory, atomic force microscopy, uncertainty

Document type Article
Journal title / Source Measurement Science and Technology
Volume 28
Issue 3
Page numbers / Article number 034005
Publisher's name IOP Publishing
Publisher's address (city only) Temple Circus, Temple Way, Bristol, BS1 6BE, United Kingdom
Publication date 2017-1-24
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/aa5075
Language English

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