Ion beam figuring machine for ultra-precision silicon spheres correction
Arnold Th., Pietag F.Ion beam figuring Form error correction Silicon sphere Avogadro project
| Document type | Article |
| Journal title / Source | Precision Engineering |
| Peer-reviewed article | 1 |
| Volume | 41 |
| Issue | 1 |
| Page numbers / Article number | 119 |
| Publisher's name | Elsevier |
| Publisher's address (city only) | Philadelphia |
| Publication date | 2015-3-31 |
| ISSN | 0141-6359 |
| DOI | 10.1016/j.precisioneng.2015.03.009 |
| Language | English |