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Ion beam figuring machine for ultra-precision silicon spheres correction

Arnold Th., Pietag F.

Ion beam figuring Form error correction Silicon sphere Avogadro project

Document type Article
Journal title / Source Precision Engineering
Peer-reviewed article 1
Volume 41
Issue 1
Page numbers / Article number 119
Publisher's name Elsevier
Publisher's address (city only) Philadelphia
Publication date 2015-3-31
ISSN 0141-6359
DOI 10.1016/j.precisioneng.2015.03.009
Language English

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Project title (JRP)
SIB03: kNOW Realisation of the awaited definition of the kilogram - resolving the discrepancies
Name of Call / Funding Programme
EMRP A169: Call 2011 SI Broader Scope