Interferometer-based scanning probe microscope for high-speed, long-range, traceable measurements
Vorbringer-Dorozhovets N., Manske E., Jäger G.nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM
| Document type | Article |
| Journal title / Source | PAK |
| Volume | 60 |
| Issue | 02 (2014) |
| Page numbers / Article number | 069-072 |
| Publisher's name | PAK |
| Publisher's address (city only) | Gliwice |
| Publication date | 2014 |
| Web URL | http://pak.info.pl/index.php?menu=artykulSzczegol&idArtykul=3967 |
| Language | English |