IN-SITU TRACEABLE CHARACTERIZATION OF THE DEPTH SENSING SYSTEM OF A NANOINDENTATION INSTRUMENT
Li ZL, Brand UB, Popadic RPIndentation instrument, depth sensing indentation, traceable calibration, homodyne laser interferometer
| Document type | Proceedings |
| Journal title / Source | 11th International Symposium on Measurement and Quality Control 2013 |
| Peer-reviewed article | 1 |
| Volume | 11th International Symposium on Measurement and Quality Control 2013 |
| Page numbers / Article number | 1-4 |
| Publisher's name | IMEKO |
| Publication date | 2013-9 |
| Conference name | 11th International Symposium on Measurement and Quality Control 2013 |
| Conference date | 11-09-2013 to 13-09-2013 |
| Conference place | Cracow-Kielce, Poland |
| ISBN | 978-1-63266-817-2 |
| Web URL | http://www.imeko.org/publications/tc14-2013/IMEKO-TC14-2013-58.pdf |
| Language | English |